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Low-temperature photoluminescence characterization of defects formation in hydrogen and helium implanted silicon at post-implantation annealing |
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Title: |
Low-temperature photoluminescence characterization of defects formation in hydrogen and helium implanted silicon at post-implantation annealing |
Author: |
Mudryi, A.V. Korshunov, F.P. Patuk, A.I. Shakin, I.A. Larionova, T.P. Ulyashin, A.G. Job, R. Fahrner, W.R. Emtsev, V.V. Davydov, V.Yu. Oganesyan, G. |
Appeared in: |
Physica. B, Condensed matter |
Paging: |
Volume 308-310 (2001) nr. C pages 4 p. |
Year: |
2001 |
Contents: |
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Publisher: |
Elsevier Science B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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